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Chemomechanics of transfer printing of thin films in a liquid environment

Scope

Chemomechanical theory and finite-element modeling of thin-film peeling from SiO₂/Si in liquid water, with reactive atomistic–continuum simulation and complementary peeling experiments in air versus water.

Summary

Liquid-assisted transfer printing detaches thin films by coupling mechanical loading with interfacial chemistry in aqueous environments. The paper develops an interface-energy-release framework that incorporates rate-dependent chemical reaction kinetics at the solid–liquid interface, then links those interface laws to mechanical peeling through peeling rate, angle, and film-thickness dependent steady-state forces. A finite-element implementation informed by atomistic detail and a reactive atomistic–continuum multiscale approach simulate film detachment at continuum resolution, while bench peeling experiments compare separation layers on wafers in dry air and water. The manuscript therefore emphasizes peel-rate and environment coupling rather than a catalog of static interface energies alone.

Methods

Continuum chemomechanical peeling framework (D + mechanics)

Energy release rate for thin-film detachment is augmented by kinetic terms for liquid reactions at interfacial bondsrate-dependent debonding, coupled to elastic film deformation under varied peel kinematics (angle, rate, thickness dependence as in Int. J. Solids Struct.).

Finite-element implementation (B, continuum)

FE solves mechanical peeling with interface laws informed by atomistic inputs (parameters not invented here—see paper).

Reactive atomistic–continuum coupling

A reactive atomistic–continuum multiscale route supplies interface parameters / reaction kinetics feeding the continuum peel model.

Experiments

Peeling tests on three separation-layer stacks comparing air vs water; quantitative comparison to theory/simulation.

Reactive atomistic block (informed by ReaxFF, not a standalone LAMMPS production case study). Molecular dynamics with ReaxFF-informed kinetics feeds a reactive atomistic–continuum stack; N/A on this page for exact timestep (fs), NVT production duration (ps), Nose–Hoover thermostat damping, and room-temperature K targets—see Int. J. Solids Struct. Interface MD uses PBC in-plane on wafer-like adhesion stacks as described there. Barostat: N/A on this summary page for the MD substrate unless the article reports NPT slab relaxation. Electric field: N/A — not part of the stated peel protocol in the abstract-level summary. Metadynamics / umbrella / replica: N/A unless the article states otherwise.

Findings

Mechanisms and regime maps

Theory, multiscale models, and experiment agree on steady-state peel forces—supporting kinetic chemical coupling beyond static adhesion. Interfacial delamination vs bulk deformation competition is explicit; a phase-style diagram guides nanomembrane transfer. Capillary vs reaction driving forces partition by wettability and stack.

Limitations / future calibration

Parameters are system-specific; new adhesives, chemistries, or solvents need recalibration.

Limitations

Model parameters are system-specific; extending quantitative predictions to new adhesives, surface chemistries, or non-aqueous liquids requires recalibration and additional validation. The paper’s multiscale coupling also means retrieval should preserve the split between continuum peeling mechanics, interface kinetic laws, and atomistic inputs used to inform those laws—none of the three alone is “the full method.”

Relevance to group

Demonstrates multiscale coupling between ReaxFF-informed chemistry and continuum fracture/peeling mechanics relevant to microfabrication and interface engineering problems. The Int. J. Solids Struct. framing is useful for retrieval queries that mix interface kinetics, peeling, and wafer transfer keywords.

Citations and evidence anchors

  • https://doi.org/10.1016/j.ijsolstr.2019.07.011